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CORRELATING THERMAL PROPERTIES OF SPUTTERED TANTALUM AND TANTALUM NITRIDE THIN FILMS OF VARYING N2 CONTENT WITH MECHANICAL, ELECTRICAL AND STRUCTURAL PROPERTIES
CORRELATING THERMAL PROPERTIES OF SPUTTERED TANTALUM AND TANTALUM NITRIDE THIN FILMS OF VARYING N2 CONTENT WITH MECHANICAL, ELECTRICAL AND STRUCTURAL PROPERTIES

By Jagdish Hazra

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